{"id":999,"date":"2023-07-08T10:35:17","date_gmt":"2023-07-08T02:35:17","guid":{"rendered":"http:\/\/home.gancool.com\/?p=999"},"modified":"2023-11-07T10:39:14","modified_gmt":"2023-11-07T02:39:14","slug":"%e9%95%93%e8%b0%b7%e5%8d%8a%e5%af%bc%e4%bd%93650v-e-mode-%e7%a1%85%e5%9f%ba%e6%b0%ae%e5%8c%96%e9%95%93%e5%a4%96%e5%bb%b6%e9%87%8f%e4%ba%a7","status":"publish","type":"post","link":"https:\/\/www.gankool.com\/?p=999","title":{"rendered":"\u9553\u8c37\u534a\u5bfc\u4f53650V E-mode \u7845\u57fa\u6c2e\u5316\u9553\u5916\u5ef6\u91cf\u4ea7"},"content":{"rendered":"\n

2023\u5e747\u67088\u65e5–\u798f\u5dde\u9553\u8c37 650V E-Mode \u7845\u57fa\u6c2e\u5316\u9553\u5916\u5ef6\u7247\u6b63\u5f0f\u901a\u8fc7\u7ec8\u7aef\u5ba2\u6237\u9a8c\u8bc1\uff0c\u6807\u5fd7\u7740\u5176\u4ea7\u54c1\u53ca\u5de5\u827a\u6b63\u5f0f\u91cf\u4ea7\u3002\u6700\u7ec8\u4ea7\u54c1\u53ef\u4ee5\u7528\u4e8e\u624b\u673a\u5feb\u5145\u3001\u7535\u6e90\u7b49\u9886\u57df\u3002<\/p>\n\n\n\n

\"Chargers<\/figure>\n\n\n\n

\u9553\u8c37\u5229\u7528\u5176\u72ec\u6709\u7684\u4e13\u5229\u6280\u672f\uff0c\u901a\u8fc7\u4e0e\u591a\u5bb6\u5ba2\u6237\u5171\u540c\u6253\u78e8\u6280\u672f\u5e73\u53f0\uff0c\u5b8c\u6210\u4e86\u4ea7\u54c1\u8bbe\u8ba1\u3001\u5f00\u53d1\u3001\u9a8c\u8bc1\u53ca\u91cf\u4ea7\u3002\u5145\u5206\u7406\u89e3\u5ba2\u6237\u53ca\u7ec8\u7aef\u5e02\u573a\u9700\u6c42\uff0c\u4ee5\u4f18\u5f02\u7684\u6027\u80fd\u6307\u6807\u3001\u4f18\u79c0\u7684\u4e00\u81f4\u6027\u5f97\u5230\u4e86\u5ba2\u6237\u7684\u8ba4\u53ef\u3002\u4e3a\u5ba2\u6237\u7684\u8bbe\u8ba1\u63d0\u4f9b\u4f4e\u6210\u672c\u3001\u9ad8\u53ef\u9760\u6027\u539f\u6750\u6599\u3002<\/p>\n\n\n\n

\u4e3b\u8981\u7684\u4ea7\u54c1\u7279\u6027\u5982\u4e0b\uff1a<\/p>\n\n\n\n

Parameter<\/strong><\/strong><\/td>SPEC<\/strong><\/strong><\/td>Measurement technique\/tool\/conditions<\/strong><\/strong><\/td>Comments<\/strong><\/strong><\/td><\/tr>
Substrate<\/strong><\/strong><\/td><\/tr>
Thickness (um)<\/td>1000<\/td>Micrometer<\/td>\u3000<\/td><\/tr>
Flat lengh (mm)<\/td>47.5<\/td>\/<\/td>\u3000<\/td><\/tr>
Dopant\/type<\/td>B\/P-type<\/td>\/<\/td>\u3000<\/td><\/tr>
Resistivity (ohm.cm)<\/td>0.005-0.02\u03a9<\/td>\/<\/td>\u3000<\/td><\/tr>
Bevel design<\/td> <111> to <110>0.25\u00b0<\/td>\/<\/td>\u3000<\/td><\/tr>
Wafer bow<\/td>\u226420 um<\/td>Stress Mapper<\/td>\u3000<\/td><\/tr>
Epi<\/strong><\/td><\/tr>
EPI total thickness (um)<\/td>4-5<\/td>PL<\/td>Base on request<\/td><\/tr>
Finished 650V EPI wafer bow (6inch) in um<\/td>\u2264\u00b135<\/td>Stress Mapper<\/td>\u3000<\/td><\/tr>
EPI surface rms roughness (AFM, indicate scan size in um2<\/sup>)<\/td>\u22641 nm in 5×5 um2<\/sup><\/td>AFM<\/td>\u3000<\/td><\/tr>
Capping layer thickness (nm)<\/td>\/<\/td>TEM<\/td>GaN cap \uff1a3nm
SiN cap\uff1a3~100nm<\/td><\/tr>
AlN interlayer(nm)<\/td>1.2<\/td>TEM<\/td>Base on request<\/td><\/tr>
AlGaN barrier Al percentage<\/td>0.18<\/td>PL<\/td>Base on request<\/td><\/tr>
AlGaN barrier thickness (nm)<\/td>20<\/td>TEM<\/td>Base on request<\/td><\/tr>
GaN channel thickness (nm)<\/td>200<\/td>TEM<\/td>Base on request<\/td><\/tr>
GaN FWHM (102)<\/td>\uff1c1800 arcsec<\/td>XRD<\/td>\u3000<\/td><\/tr>
GaN FWHM (002)<\/td>\uff1c1000 arcsec<\/td>XRD<\/td>\u3000<\/td><\/tr>
C concentration in (Al)GaN layer below GaN-UID (at\/cm3<\/sup>)- PCOR-SIMS<\/td>3E+19<\/td>SIMS<\/td>\u3000<\/td><\/tr>
Electrical Property<\/strong><\/td><\/tr>
2DEG Sheet resistance (\u03a9\/sq)<\/td>367<\/td>\u3000<\/td>\u3000<\/td><\/tr>
2DEG Carrier density (\/ cm-2<\/sup>)<\/td>9.20E+12<\/td>\u3000<\/td>\u3000<\/td><\/tr>
2DEG Electron Mobility (cm2<\/sup>\/Vs)<\/td>1897<\/td>\u3000<\/td>\u3000<\/td><\/tr><\/tbody><\/table><\/figure>\n","protected":false},"excerpt":{"rendered":"

2023\u5e747\u67088\u65e5–\u798f…<\/p>\n","protected":false},"author":1,"featured_media":1004,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-999","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"_links":{"self":[{"href":"https:\/\/www.gankool.com\/index.php?rest_route=\/wp\/v2\/posts\/999","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.gankool.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.gankool.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.gankool.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.gankool.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=999"}],"version-history":[{"count":1,"href":"https:\/\/www.gankool.com\/index.php?rest_route=\/wp\/v2\/posts\/999\/revisions"}],"predecessor-version":[{"id":1005,"href":"https:\/\/www.gankool.com\/index.php?rest_route=\/wp\/v2\/posts\/999\/revisions\/1005"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.gankool.com\/index.php?rest_route=\/wp\/v2\/media\/1004"}],"wp:attachment":[{"href":"https:\/\/www.gankool.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=999"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.gankool.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=999"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.gankool.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=999"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}